发明名称 |
Protection system for diaphragm of MEMS device |
摘要 |
A system for protecting a diaphragm of a microelectromechanical systems (MEMS) device includes a housing coupled to the MEMS device such that its sensing diaphragm is surrounded thereby. A perforated barrier in the housing is adjacent to the sensing diaphragm. A protection diaphragm in the housing has its first side exposed to an external environment of interest, and has its second side facing the perforated barrier and spaced apart therefrom. A fluid is disposed contiguously between the second side of the protection diaphragm and the sensing diaphragm. |
申请公布号 |
US8091430(B1) |
申请公布日期 |
2012.01.10 |
申请号 |
US20100924027 |
申请日期 |
2010.09.14 |
申请人 |
COCHRAN KEVIN;DEEDS MICHAEL;THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY |
发明人 |
COCHRAN KEVIN;DEEDS MICHAEL |
分类号 |
G01L7/00 |
主分类号 |
G01L7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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