| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibrating reed, a vibrator, and an oscillator, which avoid the concentration of the internal stress and have high reliability. <P>SOLUTION: A vibrating reed includes a base portion 10 and arms 20, 30, and 40 extending from the base portion. The vibrating reed further includes piezoelectric elements arranged on one main surface of each arm 20, 30, and 40 and the respective piezoelectric elements include piezoelectric films 70a, 70b, and 70c, a first electrode film 50 provided on one side of each piezoelectric film, and a second electrode film 60 provided on the other side of each piezoelectric film. The first electrode film of each piezoelectric element is arranged on the main surface side and an end part of the piezoelectric film on the base portion side lies on a flat surface of each arm. <P>COPYRIGHT: (C)2012,JPO&INPIT |
