CHARGED PARTICLE BEAM APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an inspecting apparatus that can flexibly change various scan sequences in accordance with an inspection condition and also maximally exclude dispersion of a scan period which disturbs stability of charging, thereby performing beam scanning with a stable scan period.

SOLUTION: A charged particle beam apparatus has beam scan scheduling means for scheduling beam scan on the basis of an input scan condition, and a programmable sequencer for performing beam scan control according to a beam scan schedule generated by the beam scan scheduling means. The scan scheduling means calculates a scan line reference coordinate on a scan-line unit basis on the basis of the scan condition, and issues a scan period trigger. The programmable sequence controls a supply timing of the scan line reference coordinate and a scan position of each in-line pixel on the basis of line scan procedure information and the scan period trigger supplied from the scan scheduling means.

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