发明名称 CUTTING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a cutting method for accurately detecting the state of a cutting blade. <P>SOLUTION: This cutting method for cutting a workpiece with a cutting blade includes a cutting step of positioning the cutting blade to a cutting starting position and making it cut the workpiece, and relatively processing and feeding the cutting blade and the workpiece to cut the workpiece in one direction, a cutting blade return step of, after the execution of the cutting step, positioning the cutting blade to an evacuation position where the workpiece is not cut, relatively moving the cutting blade and the workpiece, in the opposite direction to the one direction, and further positioning the cutting blade to the cutting starting position, and a blade detecting step of detecting the state of the cutting blade with a blade detecting means having a light emitting section and light receiving section arranged on both sides of the outer rim of the cutting blade during the execution of the cutting blade return step. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012024895(A) 申请公布日期 2012.02.09
申请号 JP20100167333 申请日期 2010.07.26
申请人 DISCO CORP 发明人 HARADA SHIGEKI;KURIMURA SHIGEYA
分类号 B24B49/12;B24B55/02;B24B55/04;H01L21/301 主分类号 B24B49/12
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