| 摘要 |
A gas laser oscillator includes a plurality of discharge tube arrays, each discharge tube array including a plurality of electrical discharge tubes, a support mechanism supporting the plurality of discharge tube arrays, and an optical part optically connecting the plurality of discharge tube arrays. The support mechanism includes a discharge tube linking holder and an elastic member. The elastic member joins the discharge tube linking holder to a first support rod arranged at an upper side as seen in a direction of gravity. |
