| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a droplet ejecting head that has a common liquid chamber substrate with high stiffness, in which the occurrence rate of fracture is reduced, has high productivity, and is manufactured at high yield rate. <P>SOLUTION: The droplet ejecting head includes: a nozzle substrate 3 in which a plurality of nozzle holes 30 are formed; an individual liquid chamber substrate 2 that is formed by laminating a plurality of pressure chambers 21 corresponding to the nozzle holes 30, and an actuator 26 comprising a common electrode 23, a piezoelectric element 25 and an individual electrode 24 and formed on a horizontal surface of a flow passage constituted of a vibration plate 20 as a part of a wall surface of the passage; and the common liquid chamber substrate 1, in which a space for being provided with and protecting a driver IC4, a vibration compartment 8 for securing the operating area of the actuator 26 and a common liquid chamber 10 for feeding a droplet to the pressure chambers 21 are formed. The common liquid chamber substrate 1 includes a beam-like part 7 defined in an upper part of the common liquid chamber 10 in a direction perpendicular to a nozzle array direction and also is the droplet ejecting head including a plurality of droplet feeding through-holes 6 formed by opening a pattern overlap part formed when being etched from both sides by different patterns. <P>COPYRIGHT: (C)2012,JPO&INPIT |
