Cleansing Apparatus for Substrate and Cleansing Method for the Same

摘要

The invention relates generally to a cleansing apparatus for a substrate and a cleansing method for cleansing byproducts generated after an etching process of the substrate. The cleansing apparatus comprises: a first cleansing device including a first supply unit for providing a first cleansing fluid to an etched substrate; a second cleansing device including a second supply unit for providing a second cleansing fluid to the substrate cleansed by the first cleansing fluid; and a third cleansing device including a third supply unit for providing a third cleansing fluid to the substrate cleansed by the second cleansing fluid. The first cleansing fluid and the third cleansing fluid are pure water (DI water), and the second cleansing fluid is an alkali solution.