| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a valve opening device which prevents a gas temperature rise due to adiabatic compression and shortens the time required for opening a diaphragm valve, and also is made compact. <P>SOLUTION: The valve opening device 106 includes a driving fluid supply line 230, a high-speed supply line 232 and a low-speed supply line 234. The high-speed supply line 232 is used for supplying driving fluid to the driving fluid supply line 230. The low-speed supply line 234 supplies the driving fluid to the driving fluid supply line 230 at a speed which is lower than the supply speed of the driving fluid by means of the high-speed supply line 232 and enables the temperature rise of gas due to the opening of a stop valve 102 to be prevented. The high-speed supply line 232 has a pressure control valve 250. The pressure control valve 250 is closed when the pressure of the driving fluid exceeds a closing pressure. The closing pressure is lower than the pressure at which the leakage of the gas occurs on the stop valve 102. <P>COPYRIGHT: (C)2012,JPO&INPIT |
