Laser crystallization system and method of manufacturing display apparatus using the same

摘要

A laser crystallization system and a method of manufacturing a display apparatus using the laser crystallization system are disclosed. In one embodiment, the laser crystallization system includes i) a mother substrate in which first, second, and third display regions in which amorphous semiconductor layers are formed are sequentially arranged in a first direction and ii) a stage for supporting the mother substrate and moving in the first direction and in a second direction perpendicular to the first direction. The embodiment also includes i) a first laser irradiation unit for irradiating a first laser beam having a width greater than or identical to a width of a side of one of the first, second, and third display regions in the first direction and ii) a second laser irradiation unit spaced apart from the first laser irradiation unit and irradiating a second laser beam having a width greater than or identical to the width of the side of one of the first, second, and third display regions in the first direction. Furthermore, the first laser beam may correspond to a width of a side of the first display region in the first direction, and the second laser beam may correspond to a width of a side of the third display region in the first direction.