PURPOSE: A substrate repairing device is provided to automatically align each substrate for a stage unit and properly align locations of support pins according to the size of each substrate, thereby preventing bending of each substrate. CONSTITUTION: A substrate inspecting/repairing unit(103) can move in X/Y axis direction in a gantry unit(100). A stage unit(120) is installed in the gantry unit. The substrate is loaded on the stage unit. A backlight unit is installed in the gantry unit. A location of the backlight unit is synchronized with a location of the substrate inspecting/repairing unit. The backlight unit illuminates the substrate.
申请公布号
KR20120060348(A)
申请公布日期
2012.06.12
申请号
KR20100121803
申请日期
2010.12.02
申请人
CHARM ENGINEERING CO., LTD.
发明人
KANG, DO HWAN;KIM, KII DUK;LEE, KYU HO;JEE, YOUNG SU