| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical displacement meter capable of accurately detecting the displacement of an object. <P>SOLUTION: A light projection part 1 selectively irradiates primary and secondary light whose polarization directions are different, to a work W. The reflected light from the work W is incident on a photodetector 21 through a light-receiving lens 22. A waveform generation part generates primary and secondary waveform data indicating a light-receiving quantity distribution of the primary and secondary light by the photodetector 21. A waveform processing part 7 calculates a ratio of corresponding peaks between the primary and secondary waveform data, selects one peak from each of the primary and secondary waveform data based on the calculated ratio, and detects a position of the peak. <P>COPYRIGHT: (C)2012,JPO&INPIT |
