| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flow rate measurement method of pulsatile flow and a gas flow rate measurement device for precisely measuring gas flow rate even when a flow of a gas to be a measurement object of a Laminar flowmeter is a pulsatile flow which is not a laminar flow where Reynolds number is small enough. <P>SOLUTION: The flow rate measurement method using a Laminar flowmeter 2 sets a plurality of pulsation frequencies before measurement, sets a plurality of reference flow rates Q<SB POS="POST">a</SB>having fixed and known flow rates, measures (or acquires a measurement flow rate y) a flow of a gas in each pattern combining each of the pulsation frequencies with each of the reference flow rates Q<SB POS="POST">a</SB>with the Laminar flowmeter 2 while changing a pulsation amplitude x, calculates a function showing a relation between the measurement flow rate y and the pulsation amplitude x by the Laminar flowmeter 2 in each pattern, selects a pattern most proximate to a measurement condition of the measurement from among respective patterns in measurement, and corrects the measurement flow rate y by the Laminar flowmeter 2 by using a function in the selected pattern. <P>COPYRIGHT: (C)2012,JPO&INPIT |
