| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a guide mechanism capable of keeping a gap between an air bearing and a guide on a reference surface side at a proper prescribed value even when a load on the referential surface side changes and to provide a three-dimensional measuring machine having the guide mechanism. <P>SOLUTION: The guide mechanism has: a guide having a reference surface on a first side; a guided member slidably provided for the guide along the reference surface; a reference side guide member which presses the reference surface so that it has a first gap between itself and the reference surface of the guide and is provided for the guided member; and a pressurization guide member which pressurizes a second side surface so that it has a second gap between the reference surface and a second side surface of the guide opposite and is provided for the guided member. A relative relation with the pressure in the way that a position with respect to the given pressure moves vertically with respect to the guided member is adjustable so that the first gap becomes a prescribed value. <P>COPYRIGHT: (C)2012,JPO&INPIT |
