POSITIVE TYPE PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE RESIN LAYER USING POSITIVE TYPE PHOTOSENSITIVE RESIN COMPOSITION, AND SEMICONDUCTOR DEVICE INCLUDING PHOTOSENSITIVE RESIN LAYER

摘要

PURPOSE: A positive type photo-sensitive resin composition, a photo-sensitive resin film using the same, and a semiconductor device including the photo-sensitive resin film are provided to improve sensitivity and resolution. CONSTITUTION: A positive type photo-sensitive resin composition includes a polybenzoxazole precursor with a repeating unit in the form of random copolymer, a photo-sensitive diazoquinone compound, a silane compound, a phenol compound, and a solvent. The repeating unit is represented by chemical formula 1. In chemical formula 1, X1 is derived from a diamine compound represented by chemical formula 30; X2 is an aromatic organic group or a tetravalent to hexavalent aliphatic organic group; Y1 and Y2 are respectively aromatic organic groups or divalent to hexavalent aliphatic organic groups; m and n are molar ratios, the sum of m and n is 100 mol%; m is 1 to 99mol%; and n is 1 to 99mol%.