THIN FILM TRANSISTOR ARRAY SUBSTRATE AND METHOD THEREOF

摘要

PURPOSE: A thin film transistor array substrate and a manufacturing method thereof are provided to increase an aperture ratio and minimize an overlay margin. CONSTITUTION: A stopper prevents a wet etching solution from etching or eroding a pixel electrode exposed by a contact hole(29) during a wet etching process for forming a contact electrode(31). The stopper has a size larger than the size of the contact hole. The pixel electrode is not exposed by the contact hole. And only the stopper is exposed. Therefore, the wet etching solution contacts only the stopper through the contact hole.