CONTACT TYPE ENCODING DEVICE CAPABLE OF KEEPING FROM SLIPPING

摘要

PURPOSE: A contact type encoding device having a slip prevention function is provided to prevent a slip of an object to be transferred by a conveyor and to accurately measure a moving speed of a substrate. CONSTITUTION: A contact type encoding device having a slip prevention function comprises an encoder roller(212), an encoder shaft(214), an encoder(216), and an air clamp(218). The encoder roller is arranged between transferring rollers of a conveyor and has the same height with a maximum height of the transferring roller. The encoder shaft is rotated with the encoder roller as one body. The encoder is connected to the encoder shaft. The air clamp has a height which is smaller than the maximum height of the encoder roller around the encoder roller and is connected to a negative pressure generator.