| 摘要 |
PURPOSE: A liquefaction plant of nitrogen trifluoride gas and a liquifaction method are provided to reduce use amount of liquefaction refrigerant by using refrigerant as cooling refrigerant which is vaporized and exhausted after liquefied NF-3 gas. CONSTITUTION: A liquefaction plant of nitrogen trifluoride gas and a liquifaction method comprises a pre-cooler(10), a condenser (20a), a gas supply line(30) and a return line(40). The pre-cooler cools NF_3 gas before providing the NF_3 gas to a condenser. The condenser is installed in the rear end portion of the pre-cooler and liquefies the NF_3 gas by passing the liquefied refrigerant. The gas supply line is installed between the pre-cooler(10) and the condenser(20). The gas supply line provides the frozen NF_3 gas from the pre-cooler to the condenser. |
