STRIP APARRATUS AND METHOD FOR STRIPPING THE SAME

摘要

PURPOSE: A stripping device and a stripping method using the same are provided to reduce used amount of stripping liquor by using steam when processing a remaining film. CONSTITUTION: A stripping unit(120) eliminates photo-resistor remaining on a substrate by using a stripper. Steam is stored in a steam storing unit. A steam unit(130) eliminates a remaining film of the substrate surface by using the steam. The steam unit comprises a steam spraying unit spraying the steam to the photo-resistor through a steam nozzle from the steam storing unit. A cleaning unit(140) sprays deionized water on the top of the substrate and washes the substrate. A drying unit(150) rotates the substrate which is washed and eliminates the deionized water. A discharge unit(160) discharges the substrate dried in the drying unit to a loader/un-loader unit.