METHOD FOR DETERMINING ADHESIVE CONDITION OF TRANSFER INTERFERENCE

摘要

PURPOSE: An adhesion condition determinative method is provided to efficiently transfer an object on basic material by deciding an adhesion condition in which a change of an adhesive energy is measured. CONSTITUTION: An imprint intermediary is specified. A pull-in unit, which pulls-in or pulls-off imprint intermediary, is prepared. Maximum adhesive force is measured. The maximum adhesion is converted into adhesion energy. A branching speed in which the change of the cohesive energy is measured is selected. An adhesion condition of the imprint intermediary pitches is determined based on the selected branching speed.