| 摘要 |
PURPOSE: An anti-reflection(AR) device and a method thereof are provided to consecutively processing a series of processes for AR coating. CONSTITUTION: An anti-reflection(AR) device comprises a main chamber(10), moving chambers(20) and processing chambers(50). In the main chamber, a plurality of openings(11) is formed on the sidewalls. The moving chamber is installed inside the main chamber. The moving chamber transfers a substrate by rotation. The processing chamber is installed on the outside of opening in the main chamber. The processing chamber forms a predetermined thin film on a substrate provided through the moving chamber. The main chamber additionally includes rotating tools which rotate the moving chamber. The rotating tool is a spinning table(30) in which the moving chamber is installed on the upper side.
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