SUBTRATE TRANSFERRING UNIT, SUBSTRATE PROCESSING APPARATUS HAVING THE SAME AND SUBTRATE TRANSFER METHOD

摘要

PURPOSE: A substrate chucking unit, a substrate processing apparatus including the same, and a substrate feeding method are provided to easily stick a substrate to a sticky chuck by using a vacuum absorption member as an adhesive member. CONSTITUTION: A carrier(200) moves while chucking a substrate. The carrier comprises a body of a flat plate shape and a sticky chuck(220) installed at one side of the body. A first penetration hole is formed on the body of the carrier. A second penetration hole is formed on the sticky chuck. The sticky chuck chucks the substrate by using adhesive force. A chucking module ascends and descends while adsorbing the substrate. The chucking module comprises a lift bar(410) and an adhesive member. The lift bar separates the substrate from the sticky chuck.