| 摘要 |
PURPOSE: A zinc oxide nanostructure density control method using seed layer and electronic components using the same are provided to facilitate large are growth by controlling density of a structure which is grown up by using concentration and particle size of the impurities. CONSTITUTION: A zinc oxide nanostructure density control method using seed layer comprises the following step of forming zinc oxide seed layer and growing zinc oxide nanostructure using the seed layer. The formation method of the zinc oxide seed layer comprises the following steps: dispersing impurity particles in a zinc oxide precursor solution; spreading the dispersed mixture on a substrate with a spin coating; and heat treating the substrate. In the dispersion step, a dispersing agent or stabilizer is used. In the dispersion step, the impurity particles are different kind metal oxide including TiO2 or Al2O3, etc. Concentration and particle size of the impurities are controlled. The heat treating step is processed at 200-500 deg. Celsius. An electronic component using zinc oxide nanostructure density control method comprises a ceramic condenser(2), a protective resin(4), lead terminals(6,8), a dielectric layer(10), and terminal electrodes(12,14).
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