发明名称 PATTERN FOR IMPROVED VISUAL INSPECTION OF SEMICONDUCTOR DEVICES
摘要 A SEMICONDUCTOR STRUCTURE IS DISCLOSED THAT ENHANCES QUALITY CONTROL INSPECTION OF A DEVICE. THE STRUCTURE INCLUDES A SUBSTRATE (14) HAVING AT LEAST ONE PLANAR FACE (16), A FIRST METAL LAYER (26) ON THE PLANAR FACE (16), AND COVERING SOME, BUT NOT ALL OF THE PLANAR FACE (16) IN A FIRST PREDETERMINED GEOMETRIC PATTERN, AND A SECOND METAL LAYER (27) ON THE PLANAR FACE (16), AND COVERING SOME, BUT NOT ALL OF THE PLANAR FACE (16) IN A SECOND GEOMETRIC PATTERN THAT IS DIFFERENT FROM THE FIRST GEOMETRIC PATTERN. A QUALITY CONTROL METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE IS ALSO DISCLOSED. THE METHOD INCLUDES THE STEPS OF PLACING A FIRST METAL LAYER (26) ON A SEMICONDUCTOR FACE (16) OF A DEVICE (10) IN A FIRST PREDETERMINED GEOMETRIC PATTERN, PLACING A SECOND METAL LAYER (27) ON THE SAME FACE OF THE DEVICE (10) AS THE FIRST LAYER (26) AND IN A SECOND PREDETERMINED GEOMETRIC PATTERN THAT IS DIFFERENT FROM THE FIRST GEOMETRIC PATTERN, AND THEN INSPECTING THE DEVICE (10) TO IDENTIFY THE PRESENCE OR ABSENCE OF ONE OR BOTH THE PATTERNS ON THE FACE.
申请公布号 MY146170(A) 申请公布日期 2012.07.13
申请号 MY2010PI01845 申请日期 2002.10.22
申请人 CREE, INC. 发明人 RALPH C. TUTTLE;CHRISTOPHER SEAN PLUNKET;DAVID B. SLATER, JR.;GERALD H NEGLEY;THOMAS P. SCHNEIDER
分类号 H01L21/66;H01L23/482;H01L23/544;H01L33/00 主分类号 H01L21/66
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