Device for developing patterns in thin layer of substrate for producing microstructure utilized in e.g. microfluid system, has circulating pump to create circulation movement to move front face of thin layer parallel to plane of face

摘要

The device (1) has a rectangle parallelepiped development vessel (2) containing a development liquid bath (3), and a circulating pump (13) for circulating liquid inside the bath. A suction cup (9) of a support (8) includes a positioning unit to position a thin layer (7) in the bath, so that a main plane (P) of a front face (7a) of the thin layer is parallel to bottom (4) of the vessel. The positioning unit directs the front face toward the bottom. The circulating pump creates circulation movement (F1) for moving the face parallel to the plane when the layer is positioned in the bath. An independent claim is also included for a method for developing patterns in a thin layer arranged on a support.