| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an illumination system which is capable of forming an illumination mode in a manner which is not disclosed in the prior art. <P>SOLUTION: An illumination system comprises an array of controllable mirrors configured to direct radiation towards a pupil plane and an array of lenses configured to direct radiation sub-beams towards the array of controllable mirrors, wherein a first lens of the array of lenses and a controllable mirror of the array of controllable mirrors form a first optical channel having a first refractive power and a second lens of the array of lenses and a controllable mirror of the array of controllable mirrors form a second optical channel having a second refractive power, such that a radiation sub-beam formed by the first optical channel has a first cross-sectional area and shape at the pupil plane and a radiation sub-beam formed by the second optical channel has a second different cross-sectional area and/or shape at the pupil plane. <P>COPYRIGHT: (C)2012,JPO&INPIT |
