| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma potential measurement method capable of measuring the plasma voltage, in combination of analysis of ion species, by applying a mass spectrograph without relying upon a probe measuring instrument, and capable of carrying out both mass spectrometry and plasma voltage measurement at low cost, and to provide a device using it. <P>SOLUTION: In the plasma potential measurement method of plasma 2 to be measured in a vacuum chamber 1, a mass spectrograph 3 is placed in the vacuum chamber 1, mass spectrometry is carried out by applying a bias voltage between the plasma 2 and the mass spectrograph 3, suppressor voltage in the mass spectrograph 3 is varied under conditions of ion detection, and then the plasma voltage is calculated from the relationship of the suppressor voltage where the ion current is not detected and the bias voltage. A plasma potential measurement device is also provided. <P>COPYRIGHT: (C)2012,JPO&INPIT |
