发明名称 RESIN COMPOSITION, PHOTOSENSITIVE ELEMENT, METHOD FOR FORMING RESIST PATTERN AND METHOD FOR MANUFACTURING PRINT CIRCUIT BOARD
摘要 <P>PROBLEM TO BE SOLVED: To provide a resin composition which has a novel photosensitive mechanism different from the conventional positive resist material, can obtain excellent sensitivity and resolution in great film thickness and can be used as a positive resist material, and to provide a photosensitive element using the resin composition, a method for forming a resist pattern and a method for manufacturing a print circuit board. <P>SOLUTION: A resin composition contains a high molecular compound having a trithiocarbonate structure and a compound for generating radicals by an actinic ray. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012177884(A) 申请公布日期 2012.09.13
申请号 JP20110186167 申请日期 2011.08.29
申请人 HITACHI CHEM CO LTD 发明人 TAKEUCHI KAZUMASA
分类号 G03F7/039;C08F2/38;C08L33/06;G03F7/004;H05K3/06;H05K3/18 主分类号 G03F7/039
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