| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a structure, in an excimer lamp having a metal cap welded to opposite ends of an arc tube consisting of transmissive ceramic with a metal brazing material, the arc tube having insert gas and fluorine sealed therein and a pair of external electrodes disposed on the outer face thereof, which can restrain the fluorine in the arc tube from decreasing with the passage of lighted time, thereby restricting reduction in emission intensity. <P>SOLUTION: The structure is characterized in that an oxide layer is formed on the surfaces of a metal cap and a metal brazing material, and that a fluoride layer is formed on the surface of the oxide layer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
