| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming a film of silane coupling agent in which a film of silane coupling agent can be formed evenly and firmly on a surface of a target substrate by a simple film forming apparatus, a reset time required between the completion of a film forming cycle to the beginning of the following film forming cycle is shortened, and a continuous process can be performed satisfactorily, and to provide a method for manufacturing an inkjet head using the same. <P>SOLUTION: The method includes: a first process of introducing silane coupling agent in a gas phase into a chamber 301, and adsorbing the silane coupling agent to an inner wall 301a of the chamber 301; and a second process of introducing the target substrate 125 into the chamber 301, leaving the target substrate 125 in the chamber 301 with no additional introduction of silane coupling agent in a gas phase into the chamber 301, and forming a film of the silane coupling agent desorbed from the inner wall 301a on the surface of the target substrate 125. <P>COPYRIGHT: (C)2012,JPO&INPIT |
