| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a processing fluid feeding device 1 that detects abrasion of a floating nozzle with a simply-structured position detector. <P>SOLUTION: There are provided a dresser 5 for subjecting a peripheral surface 4 of a grinding stone 3 to truing and dressing, and a nozzle 25 for feeding a processing fluid toward the peripheral surface. The nozzle is provided with an opening 26 opening on the peripheral surface and flanges 27a, 27b extending to both surfaces of the grinding stone on both sides of the opening. There are provided a biasing member 14 for biasing the nozzle to the peripheral surface of the grinding stone, a nozzle supporting member 11 for supporting the nozzle to arbitrary directions in which the nozzle is energized, a position detector 32 for detecting a relative position between the nozzle supporting member and the nozzle. The nozzle supporting member is fixed to a dresser supporting table 6 for rotatably supporting the dresser. As the dresser, a rotary dresser is used. A monocrystal diamond dresser is movable in an axial direction of the grinding stone. The nozzle supporting member is mounted on the dresser supporting table movably in the axial direction of the grinding stone so as to enable the position of the nozzle supporting member to be kept by the flanges relatively to the grinding stone. <P>COPYRIGHT: (C)2012,JPO&INPIT |
