发明名称 Composite transducer apparatus and system for processing a substrate and method of constructing the same
摘要 A transducer, system and method of constructing the same that utilizes a composite of piezoelectric pillars. In one embodiment, the invention is an apparatus for generating acoustic energy comprising: a plurality of pillars constructed of a piezoelectric material, the pillars arranged in a spaced-apart manner so that spaces exist between adjacent pillars; the pillars having a width and a height extending between a top surface and a bottom surface, wherein the height of the pillars is greater than the width of the pillars; and the spaces filled with a resilient material so as to form a composite assembly.
申请公布号 US8279712(B2) 申请公布日期 2012.10.02
申请号 US20080266543 申请日期 2008.11.06
申请人 KORBLER JOHN A.;NOVAK RICHARD;AKRION SYSTEMS LLC 发明人 KORBLER JOHN A.;NOVAK RICHARD
分类号 H04R17/00 主分类号 H04R17/00
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