IMPRINTING METHOD OF DIFFERENT SIZE WAVEGUIDE FOR OPTICAL TRANSCEIVER PLATFORM

摘要

PURPOSE: An imprinting method of a different kind size wave guide for an optical transceiver platform is provided to be applied to various wave guides of three-dimensional structure and a semiconductor process. CONSTITUTION: A channel of a large size wave guide sensation is blocked and a channel of a small size wave guide is firstly filled in order to fill a core channel of a different kind wave guide. A stage is tilted toward a filling direction and supersonic wave vibrations are applied to the stage. A wave phenomenon of the fuller surface is eliminated. A channel pattern of a PDMS(polydimethylsiloane) master is formed into emboss shape and the channel of the large size wave guide is blocked with the channel pattern of the PDMS. [Reference numerals] (AA) Large waveguide; (BB) Secondary filling direction; (CC) Channel film(PDMS); (DD) Core resin; (EE) Small waveguide; (FF) Primary filling direction