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发明名称
PROTECTIVE FILM-FORMING COMPOSITION FOR IMMERSION EXPOSURE AND PATTERN-FORMING METHOD USING THE SAME
摘要
申请公布号
KR101202688(B1)
申请公布日期
2012.11.19
申请号
KR20050050761
申请日期
2005.06.14
申请人
发明人
分类号
G03F7/004;G03C1/492;G03F7/11;G03F7/20;H01L21/027
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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