| 摘要 |
<p>PURPOSE: A semiconductor supporting member is provided to improve convenience of a manufacturing process by including a body which includes a support region and a pattern part which is formed on some external circumferential part of a support region. CONSTITUTION: A body comprises one or more support regions. A pattern part(120) is formed on some external circumferential part of the support region. A connection part(130) is formed between pattern parts on the external circumferential part of the support region. A resin(140) is formed on the pattern part. The resin includes a polymer.</p> |
