METHOD OF EVALUATING QUALITY OF WAFER OR SINGLE CRYSTAL INGOT AND METHOD OF CONTROLLING QUALITY OF SINGLE CRYSTAL INGOT BY USING THE SAME

摘要

Provided is a method of evaluating quality of a wafer or a single crystal ingot and a method of controlling quality of a single crystal ingot by using the same. The method of evaluating quality of a wafer or a single crystal ingot according to an embodiment may include performing Cu (copper) haze evaluation on a wafer or a slice of a single crystal ingot and Cu haze scoring with respect to the result of the Cu haze evaluation.