| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a scribe device capable of suppressing vibrations during a scribe operation and accurately forming a scribe groove by a laser beam. <P>SOLUTION: A laser scribe device includes: a frame 1 three-dimensionally composed of a frame material; a bottom support plate 2 supported by a lower horizontal frame 1b near an installation surface R inside the frame 1; a stone surface plate 3 mounted on the bottom support plate 2; a moving stage 13 attached to the upper surface of the stone surface plate 3; a table 15 supported on the moving stage 13 and has a brittle material substrate W mounted thereon; an upper support plate 20 for supporting a laser beam source 16; and a laser beam irradiation part 17 for irradiating the brittle material substrate W mounted on the table 15 with a laser beam from the laser beam source 16. <P>COPYRIGHT: (C)2013,JPO&INPIT |
