APPARATUS FOR MEASURING CONCENTRICITY AND PARALLELIZATION-DEGREE

摘要

PURPOSE: A device for measuring roundness and parallelization is provided to virtually perform a straight connection of openings by using a linear member and to measure vertical roundness and vertical parallelization according to a vertical position of the linear member. CONSTITUTION: A device for measuring roundness and parallelization measures the roundness and the parallelization of a first object with a first opening with respect to a second object with a second opening. The device for measuring roundness and parallelization includes a measurement unit(21) and a linear member(23). The measurement unit is inserted into the first opening. The linear member is connected to the insertion center of the measurement unit and the center of the second opening. The measurement unit includes; a first light emitting unit and a first light receiving unit for measuring a horizontal position at an arbitrary spot of the linear member; and a second light emitting unit and a second light receiving unit for measuring a vertical position at an arbitrary spot of the linear member. [Reference numerals] (24) Signal processing unit