PROCESSING METHOD USING FOCUSED ION BEAM

摘要

PURPOSE: A processing method using focused ion beam is provided to secure uniform process. CONSTITUTION: A process range is designated(S100). Focused ion beam is scanned to process the designated process range(S200). The image of a process surface is obtained(S300). The image is digitized(S400). The digitized image is analyzed to separate a completed process part from an uncompleted process part(S500). [Reference numerals] (AA) Processing FIB; (BB) End of the process; (S100) Designating a process range; (S200) Processing the FIP in the process range(etching or deposition); (S300) Photographing a processed surface image(FIB image); (S400) Processing the image(digitization); (S500) Analyzing the digitized image; (S600) Incomplete processed part exists?; (S700) Calculating a processing completion level; (S800) Level > preset processing level; (S900) Re-designating a process range(incomplete processed part)