| 摘要 |
PURPOSE: An exhaust module is provided to prevent byproducts from being attached to an inner wall of a pipe or a pump by uniformly heating the pipe to minimize a temperature deviation. CONSTITUTION: A pump provides a pumping force. A pipe(310) has an inner space. One end of the pipe is connected to the pump. The other end of the pipe is connected to a process chamber for processing a substrate. A hot wire(320) is bent several times. The hot wire is extended in the pipe in a longitudinal direction. [Reference numerals] (AA) Longitudinal direction; (BB) Width direction
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