发明名称 Method for making asymmetric double-gate transistors
摘要 A method for making a microelectronic device with one or plural double-gate transistors, including: a) forming one or plural structures on a substrate including at least one first block configured to form a first gate of a double-gate transistor, and at least a second block configured to form the second gate of the double-gate, the first block and the second block being located on opposite sides of at least one semiconducting zone and separated from the semiconducting zone by a first gate dielectric zone and a second gate dielectric zone respectively; and b) doping at least one or plural semiconducting zones in the second block of at least one given structure among the structures, using at least a first implantation selective relative to the first block, the implantation being done on a first side of the given structure, the part of the structure on the other side of the normal to the principal plane of the substrate passing through the semiconducting zone not being implanted.
申请公布号 US8399316(B2) 申请公布日期 2013.03.19
申请号 US20070521233 申请日期 2007.12.28
申请人 VINET MAUD;THOMAS OLIVIER;ROZEAU OLIVIER;POIROUX THIERRY;COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 VINET MAUD;THOMAS OLIVIER;ROZEAU OLIVIER;POIROUX THIERRY
分类号 H01L21/00 主分类号 H01L21/00
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