发明名称 FERROELECTRIC CAPACITOR FOR FLEXIBLE NONVOLATILE MEMORY DEVICE, FLEXIBLE NONVOLATILE FERROELECTRIC MEMORY DEVICE, AND MANUFACTURING METHOD FOR THE SAME
摘要 <p>PURPOSE: A ferroelectric capacitor for a flexible nonvolatile memory device, a flexible nonvolatile ferroelectric memory device, and a method for manufacturing the same are provided to easily process a device. CONSTITUTION: A semiconducting channel layer(510) is formed on a flexible substrate(500). A source and a drain region(520,530) are formed at both sides of the semiconductor channel layer. A polymer bonding layer is formed on the semiconductor channel layer. A gate electrode(590) is formed on a ferroelectric layer(550). The source and the drain electrode(570,580) are formed on the source and the drain region.</p>
申请公布号 KR20130028769(A) 申请公布日期 2013.03.19
申请号 KR20130023038 申请日期 2013.03.04
申请人 RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY 发明人 AHN, JONG HYUN;RHO, JONG HYUN
分类号 H01L27/115;H01L21/8247 主分类号 H01L27/115
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