| 摘要 |
PURPOSE: The nitric acid, the phosphoric acid, and the acetic acid are collected from the LCD mixed acid waste water. It can recycle to the LCD etchant, the high purity phosphoric acid, and all kinds of the pickling solutions. CONSTITUTION: The method for collecting the high purity phosphoric acid from acid includes next systems(1). Step of removing the nitric acid from acid and acetic acid the mixed acid waste water generating in the liquid crystal display(2) and process of manufacturing semiconductor is processed as the first vacuum evaporation. Step of obtaining the eliminates and the aluminum content 10 ~ 30 ppm phosphoric acid aqueous solution dividing and the aluminum from the residual solution by the first diffusion dialysis process. |
