| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light irradiation device which is not easily affected by heat radiated from ultraviolet light emitting elements even when the mounting density of the ultraviolet light emitting elements becomes relatively high and realizes relatively high ultraviolet irradiation energy. <P>SOLUTION: A light irradiation module has: a light irradiation device where light emitting elements are disposed on one main surface of a substrate; and a plate like heat radiation member having a passage, where a coolant for cooling the light irradiation device flows, therein. The heat radiation member has an opening of the passage on a main surface positioned at the light irradiation device, and the substrate of the light irradiation device is disposed so that the opening of the heat radiation member is covered by the other main surface. A distance between the main surface of the heat radiation member and the other main surface of the substrate becomes longer at a center part of the substrate relative to an outer peripheral part of the substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
