发明名称 CURABLE COMPOSITION FOR IMPRINT AND METHOD FOR STORING SAME
摘要 Provided is a curable composition for imprint, which is capable of forming a pattern with less pattern defects. A curable composition for imprint, which contains (A) a polymerizable compound and (B) a photopolymerization initiator, and wherein the ratio of the water content relative to the total weight of all the components other than the solvent is less than 0.8% by weight.
申请公布号 WO2013058300(A1) 申请公布日期 2013.04.25
申请号 WO2012JP76891 申请日期 2012.10.18
申请人 FUJIFILM CORPORATION 发明人 ENOMOTO YUICHIRO;KODAMA KUNIHIKO;TARUTANI SHINJI
分类号 H01L21/027;B29C59/02;C08F2/46 主分类号 H01L21/027
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