| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actuator and an optical scanner device which prevent insulation breakdown. <P>SOLUTION: An actuator is formed by laminating a driving beam, a lower electrode formed on the driving beam, a piezoelectric element provided on the lower electrode, and an upper electrode provided on the piezoelectric element. The actuator has: upper wiring connecting wiring for supplying voltage to the upper electrode formed on the driving beam with the upper electrode; and an insulation part which is formed below the upper wiring so as to cover an end part of the lower electrode and insulates the upper electrode from the lower electrode. The insulation part has an insulation extending part extending at both sides of the upper wiring in the width direction of the upper wiring. <P>COPYRIGHT: (C)2013,JPO&INPIT |
