Lithographic apparatus and a method of operating the apparatus,申请号US20100893875-传众专利搜索

发明名称	Lithographic apparatus and a method of operating the apparatus
摘要	A cleaning liquid supply system is disclosed. The cleaning liquid supply system may supply an emulsified cleaning liquid to clean an immersion lithographic apparatus. A lithographic apparatus is also disclosed.
申请公布号	US8432531(B2)	申请公布日期	2013.04.30
申请号	US20100893875	申请日期	2010.09.29
申请人	HOEKERD KORNELIS TIJMEN;DE GRAAF ROELOF FREDERIK;JANSEN HANS;LEENDERS MARTINUS HENDRIKUS ANTONIUS;VAN DER NET ANTONIUS JOHANNUS;KRAMER PIETER JACOB;KUIJPER ANTHONIE;MARTENS ARJAN HUBRECHT JOSEF ANNA;VAN DER GRAAF SANDRA;PADIY ALEXANDRE VIKTOROVYCH;ASML NETHERLANDS B.V.	发明人	HOEKERD KORNELIS TIJMEN;DE GRAAF ROELOF FREDERIK;JANSEN HANS;LEENDERS MARTINUS HENDRIKUS ANTONIUS;VAN DER NET ANTONIUS JOHANNUS;KRAMER PIETER JACOB;KUIJPER ANTHONIE;MARTENS ARJAN HUBRECHT JOSEF ANNA;VAN DER GRAAF SANDRA;PADIY ALEXANDRE VIKTOROVYCH
分类号	G03B27/42;G03B27/52	主分类号	G03B27/42
代理机构		代理人
主权项
地址

您可能感兴趣的专利