发明名称 |
INTEGRATED BACKSCATTERED ELECTRON DETECTOR WITH CATHODOLUMINESCENCE COLLECTION OPTICS |
摘要 |
An apparatus for simultaneous detection of backscattered electrons and photons from a sample. The device includes a direct detection backscattered electron detector and a photon detector. The backscattered electron detector has a reflective surface that reflects photons emitted by the sample onto the photon detector. |
申请公布号 |
WO2013063005(A1) |
申请公布日期 |
2013.05.02 |
申请号 |
WO2012US61538 |
申请日期 |
2012.10.24 |
申请人 |
GATAN, INC. |
发明人 |
STOWE, DAVID, J.;HUNT, JOHN;GALLOWAY, SIMON, A. |
分类号 |
H01J37/244 |
主分类号 |
H01J37/244 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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