发明名称 Production of polycrystalline silicon in substantially closed-loop systems
摘要 Production of polycrystalline silicon in a substantially closed-loop process is disclosed. The processes generally include decomposition of trichlorosilane produced from metallurgical grade silicon.
申请公布号 US8449848(B2) 申请公布日期 2013.05.28
申请号 US20100910553 申请日期 2010.10.22
申请人 BHUSARAPU SATISH;HUANG YUE;GUPTA PUNEET;MEMC ELECTRONIC MATERIALS, INC. 发明人 BHUSARAPU SATISH;HUANG YUE;GUPTA PUNEET
分类号 B01J8/04;B01J8/18 主分类号 B01J8/04
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