发明名称 |
Production of polycrystalline silicon in substantially closed-loop systems |
摘要 |
Production of polycrystalline silicon in a substantially closed-loop process is disclosed. The processes generally include decomposition of trichlorosilane produced from metallurgical grade silicon.
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申请公布号 |
US8449848(B2) |
申请公布日期 |
2013.05.28 |
申请号 |
US20100910553 |
申请日期 |
2010.10.22 |
申请人 |
BHUSARAPU SATISH;HUANG YUE;GUPTA PUNEET;MEMC ELECTRONIC MATERIALS, INC. |
发明人 |
BHUSARAPU SATISH;HUANG YUE;GUPTA PUNEET |
分类号 |
B01J8/04;B01J8/18 |
主分类号 |
B01J8/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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