| 摘要 |
A fluid supply system includes a fluid supply source, a first valve unit, a second valve unit, a first pressure detector, a second pressure detector, a third pressure detector, and a controller. If the pressure detected by the third pressure detector is less than a shutoff pressure at a timing of starting supply of fluid from the fluid supply source, the controller calculates a pressure equalization time from a timing at which opening of a pilot valve is completed to a timing at which a main valve starts closing, based on the pressures detected by the first pressure detector, the second pressure detector and the third pressure detector, sets a valve-open waiting time based on the pressure equalization time, and controls opening of the second valve unit upon elapse of the valve-open waiting time after controlling opening of the first valve unit.
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