发明名称 SOLAR CELL MANUFACTURING METHOD, AND SOLAR CELL
摘要 This solar cell manufacturing method has: a first center alignment step (S10) wherein a substrate center position is set as a reference position with respect to treatment in an impurity injection step (S20); and a second center alignment step (S30) wherein a substrate center position is set as a reference position with respect to treatment in an electrode forming step (S40).
申请公布号 WO2013080680(A1) 申请公布日期 2013.06.06
申请号 WO2012JP76322 申请日期 2012.10.11
申请人 ULVAC, INC. 发明人 SAKATA GENJI;YOKOO HIDEKAZU;TOMITA MAKOTO;SUZUKI HIDEO
分类号 H01L31/068;H01L31/18 主分类号 H01L31/068
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